ChEMS Seminar: Uniform Arrays of Nano-Pillars
Professor Delroy Baugh
Department of Chemistry and Biochemistry
University of California, Los Angeles
Uniform arrays of nano-pillars, nano-rings and rings atop nano-pillars were fabricated using MNSL (modified nano-sphere lithography) on the H:Si(111-(1x1) terminated surface and were observed using AFM and SEM. Self-assembled monolayer masks utilizing polystyrene spheres(450±10nm) were used as the etch mask during fabrication with physical Ar+ ion bombardment and SF6 RIE. The initial Ar+ ion etch step was varied to achieve faster etch rates and narrowed nano-pillar etch widths. The nano-ring systems were intrinsically “self-wired” during the fabrication process. The wired nano-ring systems were modeled theoretically and showed a developed band-structure with as few as 3 connected nano-rings. The Si nanostructures were also “dressed” with self-assembled Ge quantum dots. These Ge/Si nano-architectured structures possess the basic framework for fabricating novel nano-electronic and nano-optoelectronic devices.
Bio: Delroy Baugh is an Associate Professor in UCLA. He received his B.S., M.S. and Ph.D. from University of Southern California. His research areas include Tip Enhanced Raman Spectroscopy (TERS), Gold Nano-fingers molecular Trapping with SERS detection, Memristor and Memristive Systems, Nanoscale Architecture and Quantum Devices, Quantum Interference, Photochemistry of Small Systems.